Mask & Wafer Inspection Accessories

 

  • Holders support masks on outer edge preventing damage to sensitive surfaces
  • Includes cutouts for edge-grip tools, allowing easy placement and removal of masks

Rotating Wafer Puck Paddle

Mask Paddle

  • Multiple holders are easily interchangeable on one stage using paddle guide set
  • For use with Semprex X-Y stages (each stage must be equipped with a paddle guide set)

PART #

DESCRIPTION

 FOR 4" STAGES

142-240-00

M4 Paddle Guide Set

13-40##.00

M4 Mask Paddle

102-094-00

M4 Wafer Paddle, 3 inch & 4 inch

142-242-3n

M4 Rotating Wafer Puck Paddle

142-242-4n

M4 Rot. Vacuum Wafer Puck Pad. w/Valve & Hose

 FOR 6" STAGES

142-260-00

M6 Paddle Guide Set

13-60##.00

M6 Mask Paddle

128-052-00

M6 Wafer Paddle, 5 inch & 6 inch

142-262-3n

M6 Rotating Wafer Puck Paddle

142-262-4n

M6 Rot. Vacuum Wafer Puck Pad. w/Valve& Hose

 FOR 8" STAGES

142-280-00

M8 Paddle Guide Set

142-280-10

M8 Paddle Guide Set, Side Load for Transmitted Stages

13-80##.00

M8 Mask Paddle

142-282-08

M8 Wafer Paddle, 6 inch & 8 inch

142-282-3n

M8 Rotating Wafer Puck Paddle

142-282-4n

M8 Rot. Vacuum Wafer Puck Pad. w/Valve & Hose

 FOR 12" STAGES

142-290-00

M300 Paddle Guide Set

142-292-09

M300 Wafer Paddle, 8 inch & 12 inch

142-292-3n

M300 Rotating Wafer Puck Paddle

142-292-4n

M300 Rototating Vacuum Wafer Puck Paddle. w/ Valve & Hose

 ADDITIONAL ATTACHMENTS

142-240-02

Add-on 2 inch Wafer Guide on 4 inch Puck

142-240-03

Add-on 3 inch Wafer Guide on 4 inch Puck

142-260-04

Add-on 4 inch Wafer Guide on 6 inch Puck

142-260-05

Add-on 5 inch Wafer Guide on 6 inch Puck

142-280-05

Add-on 5 inch Wafer Guide on 8 inch Puck

142-280-06

Add-on 6 inch Wafer Guide on 8 inch Puck

142-290-08

Add-on 8 inch Wafer Guide on 12 inch Puck

102-387-00

Paddle Alignment Stop (mounts on stage )

 ORDERING INFORMATION

    1) For mask size, please specify ## as:
           17 = 2.5 inch (M4,M6,M8)   18 = 3 inch (M4,M6,M8)
           19 = 3.5 inch (M4,M6)         
    20 = 4 inch (M4,M8)
           22 = 5 inch (M6,M8)             24 = 6 inch (M6,M8)
           26 = 7 inch (M8)

    2) For wafer puck size, please specify n as:
           4 = 3 inch & 4 inch (M4,M6)
           6 = 5 inch & 6 inch (M4,M6,M8)
           8 = 6 inch & 8 inch (M6,M8,M300)
           9 = 8inch & 12inch (M300)

    3) Order one paddle guide with one or more paddles per stage.

    4) Vacuum Chuck mounts directly to stage top plate and
         includes precision rotation knob.
     

 

 


    
 

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